device for measuring a surface structure, system for measuring a surface structure and program

摘要

a device for measuring a surface structure according to the present invention includes a component for detecting a surface structure.the measurement results for a surface structure of a measurable object, and the measurement results as a change in the movement of a kontaktstifts a detector are identifiedif the surface of the measured object with the kontaktstift followed; a stellungsdetektionssensor, a measured position detected.and this is a position in the measurement by the detector is a speicherkomponente with helical korrekturwerten,.any of a variety of positions; and a korrekturkomponente which the measured position with the variety of positions in the speicherkomponente are stored.compares the results with the use of a korrekturwertes and corrected, a position corresponding to the measured position is synonymous.