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PHASE MODULATOR, PHASE MODULATOR CONTROL METHOD, AND STRIP PROJECTION DEVICE

机译:相位调制器,相位调制器控制方法和条带投影装置

摘要

A phase modulator 10 includes one or more waveguides that include at least one first waveguide 21 and a plurality of heaters disposed on a substrate 12. The plurality of heaters include a first heater 31 that heats the first waveguide 21, and a second heater that heats a position 21 spaced from the first waveguide. The plurality of heaters are operated so that the total power consumption of the plurality of heaters is constant. The plurality of heaters may be operated so that the change of the power consumption of the first heater 31 and the change of the power consumption of the second heater 32 compensate each other.
机译:相位调制器10包括一个或多个波导,该一个或多个波导包括至少一个第一波导21和设置在基板12上的多个加热器。多个加热器包括加热第一波导21的第一加热器31和加热第一波导21的第二加热器。与第一波导间隔开的位置21。操作多个加热器,使得多个加热器的总功耗恒定。可以操作多个加热器,使得第一加热器31的功率消耗的变化和第二加热器32的功率消耗的变化相互补偿。

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