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METHOD AND SYSTEM FOR RECONSTITUTING COLOR INFORMATION OF WHITE LIGHT OPTICAL PROFILOMETRY MEASURED SAMPLE, AND APPLICATIONS THEREOF

机译:重构白光光学测色样颜色信息的方法和系统及其应用

摘要

A method for reconstructing color information of a sample measured by white light optical profilometry, comprising acquiring (21) interferograms at a plurality of points or pixels of said sample, which method further comprising, for at least one point of measuring: - a calculation (22) of the optical spectral density of the interferogram me, - from this optical spectral density, a determination of a spectral reflectance, - a treatment (24) of said spectral reflectance to generate an information of color of said sample (17).
机译:一种用于重建通过白光光学轮廓测量法测量的样本的颜色信息的方法,包括在所述样本的多个点或像素处获取(21)干涉图,该方法还包括针对至少一个测量点:-计算(干涉图的光谱密度me的22),-从该光谱密度,确定光谱反射率,-对所述光谱反射率的处理(24),以产生所述样品(17)的颜色信息。

著录项

  • 公开/公告号FR3067108A1

    专利类型

  • 公开/公告日2018-12-07

    原文格式PDF

  • 申请/专利权人 UNITY SEMICONDUCTOR;

    申请/专利号FR20170054855

  • 申请日2017-06-01

  • 分类号G01J3/50;G01B11;

  • 国家 FR

  • 入库时间 2022-08-21 11:43:55

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