首页> 外国专利> METHOD AND SYSTEM FOR RECONSTITUTING COLOUR INFORMATION OF A SAMPLE MEASURED BY WHITE LIGHT OPTICAL PROFILOMETRY, AND APPLICATIONS OF SAID METHOD

METHOD AND SYSTEM FOR RECONSTITUTING COLOUR INFORMATION OF A SAMPLE MEASURED BY WHITE LIGHT OPTICAL PROFILOMETRY, AND APPLICATIONS OF SAID METHOD

机译:重构白光光学色度法测得样品颜色信息的方法和系统及应用方法

摘要

The invention relates to a method for reconstituting colour information of a sample measured by white light optical profilometry, comprising an acquisition (21) of interferograms at a plurality of points or pixels of said sample, said method also comprising, for at least one measurement point: - calculating (22) the optical spectral density of the interferogram, - determining a spectral reflectance from said optical spectral density, and - processing (24) said spectral reflectance to generate colour information of said sample (17).
机译:本发明涉及一种用于重构通过白光光学轮廓测定法测量的样品的颜色信息的方法,该方法包括在所述样品的多个点或像素处的干涉图的采集(21),所述方法还包括针对至少一个测量点的干涉图--计算(22)干涉图的光谱密度,-从所述光谱密度确定光谱反射率,以及-处理(24)所述光谱反射率以产生所述样品(17)的颜色信息。

著录项

  • 公开/公告号WO2018219785A1

    专利类型

  • 公开/公告日2018-12-06

    原文格式PDF

  • 申请/专利权人 UNITY SEMICONDUCTOR;

    申请/专利号WO2018EP63705

  • 申请日2018-05-24

  • 分类号G01B9/02;G01J3/28;G01J3/453;G01J3/46;

  • 国家 WO

  • 入库时间 2022-08-21 11:57:56

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