IMPROVED MANUFACTURING METHOD OF OPTICAL DETECTOR BASED ON PHOTODIODES AND DEVICE THEREFOR

摘要

The invention relates to a method of manufacturing (700) a hybrid type optical detector comprising the steps of: assembling (100) by an assembly layer (11) on the one hand an absorbing structure (Sabs) and on the other hand a reading circuit (ROIC), -gravating (200) locally through the absorbing structure, the assembly layer and the reading circuit to the contacts, so as to form interconnection holes (IH) electrical, -drop (300) a protective layer (PL, PLsca, PLd, PLscna, PLsc0) on the walls of the vias -réaliser (400) a doped zone (DZ) of a second type of doping different from the first type of dopant diffusion doping (Dop) in the absorbent structure through said protective layer, said zone extending annularly around said vias (IH) so as to constitute a diode (PhD), -drop (500) a metallization layer (ML) on the walls vias (IH) for electrically connecting the doped zone (DZ) with the contact (TLC).