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Inferential process modeling,quality prediction and fault detection using multi-stage data segregation

机译:推理过程建模,质量预测和使用多阶段数据隔离的故障检测

摘要

A process modeling technique uses a single statistical model developed from historical data for a typical process and uses this model to perform quality prediction or fault detection for various different process states of a process. The modeling technique determines means (and possibly standard deviations) of process parameters for each of a set of product grades, throughputs, etc., compares on-line process parameter measurements to these means and uses these comparisons in a single process model to perform quality prediction or fault detection across the various states of the process. In this manner, a single process model can be used to perform quality prediction or fault detection while the process is operating in any of the defined process stages or states.
机译:过程建模技术使用从历史数据中为典型过程开发的单个统计模型,并使用该模型对过程的各种不同过程状态执行质量预测或故障检测。建模技术确定一组产品等级,产量等中每一个产品的过程参数的均值(可能还有标准偏差),将在线过程参数测量值与这些均值进行比较,并在单个过程模型中使用这些比较来执行质量跨过程各种状态的预测或故障检测。以这种方式,当过程以任何定义的过程阶段或状态进行操作时,可以使用单个过程模型来执行质量预测或故障检测。

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