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MONOLITHIC MULTISPECTRAL VISIBLE-AND-INFRARED IMAGER

机译:单体多光谱可见红外成像仪

摘要

The invention relates to a radiation detection device including a silicon substrate and an infrared photodiode made of a material optimized for infrared detection. The substrate comprises a photosensitive area, readout circuits, and interconnects formed in an electrically-insulating material. The interconnects and the metal contact connect the readout circuits, the photosensitive areas, and the infrared photodiode. The detection device also comprises an infrared radiation filtering structure which covers the photosensitive area without covering the infrared photodiode.
机译:放射线检测装置技术领域本发明涉及一种放射线检测装置,该放射线检测装置包括硅基板和由针对红外线检测而优化的材料制成的红外线光电二极管。基板包括光敏区域,读出电路和以电绝缘材料形成的互连。互连和金属触点连接读出电路,光敏区域和红外光电二极管。该检测装置还包括红外辐射过滤结构,其覆盖光敏区域而不覆盖红外光电二极管。

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