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ELECTROMAGNETIC RADIATION DETECTOR WITH MICRO-ENCAPSULATION, AND DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION USING SUCH DETECTORS
ELECTROMAGNETIC RADIATION DETECTOR WITH MICRO-ENCAPSULATION, AND DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION USING SUCH DETECTORS
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机译:具有微囊化的电磁辐射检测器,以及使用这种检测器的电磁辐射检测装置
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摘要
This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
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