METHOD FOR ANALYZING THE RF PERFORMANCE OF A PROBE CARD, DETECTOR ASSEMBLY AND SYSTEM FOR ANALYZING THE RF PERFORMANCE OF A PROBE CARD

摘要

A system (1) for analyzing a probe card (10) comprises a signal generator (20) adapted to generate a radio frequency test signal. a connector (25) for inputting into the probe card (10) the radio frequency test signal, and a detector assembly (3). The detector assembly (3) comprises an RF chuck (14) for receiving a radio frequency signal from the probe card (10), and a sensor (13) configured to receive the radio frequency signal from the RF chuck (14). The sensor (13) is configured to measure a magnitude of the radio frequency signal and to output a measurement signal that represents only the magnitude of the radio frequency signal. The RF chuck (14) and the sensor (13) are mechanically coupled.