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PLASMA IRRADIATION DEVICE AND PLASMA IRRADIATION METHOD
PLASMA IRRADIATION DEVICE AND PLASMA IRRADIATION METHOD
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机译:等离子体辐照装置及等离子体辐照方法
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摘要
A plasma emitting device capable of controlling plasma applied to an application target body to a constant level. The plasma emitting device includes at least one of: a plasma emitting device configured to eject plasma; a container arranged such that at least a plasma emission port of the plasma emitting device is inside the container; and a gas sensor configured to measure an atmosphere inside the container.
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