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METHOD OF MANUFACTURING MOS2 HAVING 1T CRYSTAL STRUCTURE
METHOD OF MANUFACTURING MOS2 HAVING 1T CRYSTAL STRUCTURE
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机译:具有1T晶体结构的MOS2的制造方法
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摘要
Provided is a method of manufacturing MoS2 having a 1T crystal structure. The method includes performing phase transition from a 2H crystal structure of MoS2 to the 1T crystal structure by reacting MoS2 having the 2H crystal structure with CO gas. The phase transition includes annealing the MoS2 having the 2H crystal structure in an atmosphere including CO gas.
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