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METHOD FOR DIMENSIONAL X-RAY MEASUREMENT, IN PARTICULAR BY COMPUTED TOMOGRAPHY, AND X-RAY COMPUTED TOMOGRAPHY SCANNER

机译:X射线计算机断层扫描仪特别是测量X射线的方法以及X射线计算机断层扫描仪

摘要

The invention relates to a method for dimensional measurement by way of X-ray computed tomography, featuring the steps (a) Irradiating a test object (26) with non-monochromatic X-ray radiation from a virtually punctiform X-ray source (12), (b) measuring the intensity (I) of the X-ray radiation (22) in the radiation path behind the test object (26) by means of a detector (14) which has a plurality of pixels (P) to obtain pixel-dependent intensity data (I(P)), and (c) calculating at least one dimension (H) of the test object (26) using the pixel-dependent intensity data (I(P)). According to the invention, the pixel-dependent intensity data (I(P)) is corrected by the influence of an effective penetration depth (τ) on the detector and/or a displacement of the effective source location (Q) on a target (20) of the X-ray source (12).
机译:本发明涉及一种通过X射线计算机断层摄影术进行尺寸测量的方法,其特征在于以下步骤:(a)用来自虚拟点状X射线源(12)的非单色X射线辐射照射测试对象(26)。 (b)通过具有多个像素(P)的检测器(14)测量被测物(26)后面的辐射路径中X射线辐射(22)的强度(I)依赖强度数据(I(P)),以及(c)使用依赖于像素的强度数据(I(P))计算测试对象(26)的至少一维(H)。根据本发明,通过依赖于探测器的有效穿透深度(τ)和/或目标上的有效源位置(Q)的位移来校正像素相关强度数据(I(P))。 X射线源(12)中的20)。

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