METHOD FOR DIMENSIONAL X-RAY MEASUREMENT, IN PARTICULAR BY COMPUTED TOMOGRAPHY, AND X-RAY COMPUTED TOMOGRAPHY SCANNER

摘要

The invention relates to a method for dimensional measurement by way of X-ray computed tomography, featuring the steps (a) Irradiating a test object (26) with non-monochromatic X-ray radiation from a virtually punctiform X-ray source (12), (b) measuring the intensity (I) of the X-ray radiation (22) in the radiation path behind the test object (26) by means of a detector (14) which has a plurality of pixels (P) to obtain pixel-dependent intensity data (I(P)), and (c) calculating at least one dimension (H) of the test object (26) using the pixel-dependent intensity data (I(P)). According to the invention, the pixel-dependent intensity data (I(P)) is corrected by the influence of an effective penetration depth (τ) on the detector and/or a displacement of the effective source location (Q) on a target (20) of the X-ray source (12).