HIDDEN DEFECT DETECTION AND EPE ESTIMATION BASED ON THE EXTRACTED 3D INFORMATION FROM E-BEAM IMAGES

摘要

A method for determining the existence of a defect in a printed pattern includes obtaining a) a captured image of a printed pattern from an image capture device, and b) a simulated image of the printed pattern generated by a process model. The method also includes generating a combined image as a weighted combination of portions of the captured image and the simulated image. Also, the method includes determining whether a defect exists in the printed pattern based on the combined image.