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POWER SUPPLY DEVICE FOR PLASMA, PLASMA DEVICE, AND METHOD FOR CONTROLLING POWER SUPPLY DEVICE FOR PLASMA
POWER SUPPLY DEVICE FOR PLASMA, PLASMA DEVICE, AND METHOD FOR CONTROLLING POWER SUPPLY DEVICE FOR PLASMA
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机译:等离子电源装置,等离子装置及等离子电源装置的控制方法
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摘要
A plasma power supply device includes an AC power supply configured to generate an AC voltage of a predetermined frequency for application to a pair of electrodes by way of a power supply harness which is replaceable partially or wholly to change a wiring length and which is flexible, and a control section configured to set the predetermined frequency of the AC power supply so that the frequency becomes lower as the power supply harness becomes longer.
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