TUBULAR PERC SINGLE-SIDED PHOTOVOLTAIC CELL AND METHOD FOR FABRICATION THEREOF AND DEDICATED DEVICE

摘要

A monofacial tube-type PERC solar cell is disclosed, and comprises a rear silver busbar (1), an all-aluminum rear electric field (2), a rear composite film (3), P-type silicon (5), an N-type emitter (6), a front passivation film (7), and a front silver electrode (8). The rear composite film (3) includes one or more of an aluminum oxide film, a silicon dioxide film, a silicon oxynitride film, and a silicon nitride film, and is deposited on a rear surface of a silicon wafer by a tubular PECVD device. The tubular PECVD device includes four gas lines of silane, ammonia, trimethyl aluminum, and nitrous oxide. A graphite boat is employed to load and unload the silicon wafer in the tubular PECVD device, and a pin slot of the graphite boat has a depth of 0.5-1 mm. In addition, a method and a device for preparing the monofacial tube-type PERC solar cell is disclosed. Such monofacial tube-type PERC solar cell has advantages of high photoelectric conversion efficiency, high appearance quality and high electroluminescence yield, and solves the problems of scratching and undesirable coating due to the process.