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APPARATUS AND METHOD FOR THE TREATMENT OF A SUBSTRATE WITH A MULTIPLICITY OF SOLID PARTICLES

机译:处理具有多个固体颗粒的基质的设备和方法

摘要

An apparatus for use in the treatment of substrates with a solid particulate material, said apparatus comprising: (a) a housing having mounted therein a rotatably mounted drum (8) having an inner surface and an end wall; and (b) access means for introducing said substrates into said drum, wherein said drum comprises storage means (2) for storage of said solid particulate material and a plurality of flow paths to facilitate flow of said solid particulate material between said storage means and the interior of said drum (8), characterised in that: said drum (8) comprises a dispensing flow path (5) to facilitate flow of said solid particulate material from said storage means (2) to the interior of said drum (8), and a collecting flow path (6) to facilitate flow of said particulate material from the interior of said drum (8) to said storage means (2), wherein said dispensing flow path (5) and said collecting flow path (6) are different flow paths.
机译:一种用于用固体颗粒材料处理基板的设备,所述设备包括:(a)壳体,该壳体中安装有可旋转安装的鼓(8),该鼓具有内表面和端壁; (b)用于将所述基板引入所述滚筒的进入装置,其中,所述滚筒包括用于存储所述固体颗粒材料的存储装置(2)和多个流动路径,以促进所述固体颗粒材料在所述存储装置和所述容器之间的流动。所述滚筒(8)的内部,其特征在于:所述滚筒(8)包括分配流动路径(5),以促进所述固体颗粒材料从所述存储装置(2)流到所述滚筒(8)的内部,收集流动路径(6),以促进所述颗粒材料从所述滚筒(8)的内部流向所述存储装置(2),其中,所述分配流动路径(5)和所述收集流动路径(6)不同流路。

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