METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS

摘要

Described is a user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process. The user interface comprises a library of control elements, each control element being selectable by a user, a control flow editor configured to organize said control elements into a control flow representing the control strategy; and a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.