INTEGRATED OPTICAL TRANSDUCER AND METHOD FOR DETECTING DYNAMIC PRESSURE CHANGES

摘要

An integrated optical transducer (1) for detecting dynamic pressure changes comprises a micro-electro-mechanical system, MEMS, die (10) having a MEMS diaphragm (11) with a first side (12) exposed to the dynamic pressure changes and a second side (13), and an application-specific integrated circuit, ASIC, die (20) having an optical interferometer assembly. The interferometer assembly comprises a beam splitting element (21) for receiving a source beam (30) from a light source (23) and for splitting the source beam (30) into a probe beam (31) in a first beam path and a reference beam (32) in a second beam path, a beam combining element (22) for combining the probe beam (31) with the reference beam (32) to a superposition beam (33), and a detector (24) configured to generate an electronic interference signal depending on the superposition beam (33). The MEMS die (10) is arranged with respect to the ASIC die (20) such that a gap is formed between the second side (12) of the diaphragm and the ASIC die (20), with the gap defining a cavity (14) and having a gap height. The first beam path of the probe beam (31) comprises coupling into the cavity (14), reflection off of a deflection point or a deflection surface (16) of the diaphragm (11) and coupling out of the cavity (14).