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STRAIN ELEMENT AND FORCE SENSOR INCLUDING STRAIN ELEMENT
STRAIN ELEMENT AND FORCE SENSOR INCLUDING STRAIN ELEMENT
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机译:应变元素和包括应变元素的力传感器
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摘要
Provided are a strain body and a force sensor provided with the strain body, capable of improving reliability while securing reliable electric connection between an electrode terminal and a terminal of a lead wire. A strain body 16 according to an embodiment comprises a central portion 161, an outer peripheral portion 162 surrounding the central portion, connecting portions 163 connecting the central portion and the outer peripheral portion, strain sensors S1 to S32 provided on main surfaces of the connecting portions, reference resistors RS4 to RS30 provided on a main surface of the central portion, and constructing a bridge circuit with the strain sensors, an electrode 171 provided on a main surface of the central portion and electrically connected to the strain sensors and the reference resistors to take a detection signal of the bridge circuit, a lead wire 182 making electric connection between the electrode and the outside, and an anisotropic conductive film 181 provided between the electrode and the lead wire to make electric connection between a terminal of the electrode and a terminal of the lead wire.
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