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WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT APPARATUS, METHOD OF MANUFACTURING OPTICAL ELEMENT, AND METHOD OF MANUFACTURING OPTICAL SYSTEM
WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT APPARATUS, METHOD OF MANUFACTURING OPTICAL ELEMENT, AND METHOD OF MANUFACTURING OPTICAL SYSTEM
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机译:波前传感器,波前测量装置,制造光学元件的方法以及制造光学系统的方法
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摘要
A wavefront sensor includes a splitting element configured to split an incident light beam into a plurality of light beams, an image sensor configured to receive the plurality of light beams, and processing means configured to calculate a wavefront of the incident light beam based on an intensity distribution of the plurality of light beams received by the image sensor. The splitting element is either in direct contact with the image sensor or in contact with the image sensor via a plate glass. In the calculation of the wavefront, the processing means corrects a relative positional deviation between the splitting element and the image sensor by calculating a rotation about a rotation axis.
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