LENS ARRAY, WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT APPARATUS, SHAPE MEASUREMENT APPARATUS, ABERRATION MEASUREMENT APPARATUS, MANUFACTURING METHOD OF OPTICAL ELEMENT, AND MANUFACTURING METHOD OF OPTICAL DEVICE

摘要

A lens array includes a plurality of lenses that collect divided test light and form spots. Each lens includes a lens member, and a light shielding mask provided concentric to the lens member along a perimeter edge thereof, the light shielding mask shielding a part of the light and transmitting a part of the light. The light shielding mask is formed to satisfy a predetermined mathematical condition of light transmission.