Non-destructive inspection measurement system and non-destructive inspection measurement method

摘要

PROBLEM TO BE SOLVED: To provide a non-destructive inspection measurement system capable of measuring the dimensions of a subject body. A non-destructive inspection and measurement system 10 has an exciting coil 113 that excites a subject body, a detection coil 121 that outputs a magnetic field change generated in the subject body, and a sinusoidal signal or different from the exciting coil 113. It is provided with a measuring device 3 that applies a combined signal of frequencies, detects a voltage from the detection coil 121, and measures the dimension t2 of the subject body. For a plurality of parts of the subject body whose dimensions t2 are known and different, the voltage from the detection coil 121 is measured for each dimension t2, and the amplitude ratio is determined from the amplitude ratio and phase difference between this and the reference voltage. -Based on the calibration gradient calculation unit 310 that calculates the gradient of the straight line connecting at least two measurement results on the retardation plane, and the gradient calculated for the dimension t2 for each of the plurality of the dimensions t2. A simultaneous equation is constructed from the relationship with the obtained value, and the dimension t2 is estimated at the time of measuring the dimension t2. [Selection diagram] Fig. 1