Lanthanum hexaboride film and its manufacturing method

摘要

PROBLEM TO BE SOLVED: To provide a LaB6 film or a metal hexaboride film having good crystallinity and optical response characteristics. SOLUTION: By an electron beam (EB) deposition method using a metal hexaboride target such as LaB6, a substrate temperature is in the temperature range of 700 ° C. to 800 ° C. and under a pressure lower than 10-4 Pa. Film formation is performed by depositing at a relatively high speed of 1Å / s to 100Å / s. The LaB6 film or the metal hexaboride film formed under these conditions has a higher crystal orientation than the conventional LaB6 film, and is closer to gold in the near infrared wavelength range of 700 nm to 3000 nm, and is closer to gold than W or Mo. It has excellent optical properties, and has better heat resistance and structural stability than gold. [Selection diagram] FIG. 8