Flaw detector, flaw detection method and flaw detection program

摘要

PROBLEM TO BE SOLVED: To provide a flaw detector for efficiently inspecting minute scratches on a surface. SOLUTION: The flaw detection device 1 includes an illumination device 20 that irradiates the inspection surface 2a for inspecting the presence or absence of scratches with irradiation light 100, a camera 30 that receives the reflected light 101 reflected by the irradiation light on the inspection surface, and a control device 50. .. The control device 50 inspects the irradiation direction to be irradiated with the irradiation light 100 based on at least one of the inspection surface illuminance on the inspection surface 2a when the irradiation light 100 is irradiated and the camera illuminance received by the camera 30. The illumination angle θl formed by the surface 2a and the imaging angle θc formed by the optical axis direction 110 of the camera to be set and the inspection surface 2a are determined. The control device 50 determines the position of the lighting device 20 based on the determined lighting angle θl. The control device 50 determines the position of the camera 30 based on the determined imaging angle θc. [Selection diagram] Fig. 1