SUBSTRATE INCLUDING SILICON LAYER AND DIAMOND LAYER HAVING SILICON-DIAMOND INTERFACE OPTICALLY FINISHED (OR CLOSED)

摘要

To provide a laminated substrate including a silicon layer resistant to stress after growth and a diamond layer.SOLUTION: A laminated substrate includes: a silicon layer 4 having an optically finished surface; and a diamond layer 6 grown by chemical vapor deposition (CVD) on the optically finished surface of the silicon layer 4. In an interface 8 between the silicon layer 4 and the diamond layer 6, the optically finished surface of the silicon layer 4 has a surface roughness (Ra) of 100 nm or less.SELECTED DRAWING: Figure 1