METHOD FOR MANUFACTURING MICROLENS ARRAY SUBSTRATE, MICROLENS ARRAY SUBSTRATE, ELECTRO-OPTIC DEVICE AND ELECTRONIC APPARATUS

摘要

To provide a method for manufacturing a microlens array substrate, by which the process of manufacturing is simplified and a flat portion is formed with high accuracy, a microlens array substrate, an electro-optic device, and an electronic apparatus.SOLUTION: A method for manufacturing a microlens array substrate ML includes: a step S1 of forming a high refractive index film 25m on a transparent substrate 21; a step S2 of forming a first low refractive index film 26m having a refractive index lower than that of the high refractive index film 25m on the high refractive index film 25m; a step S3 of forming a resist pattern 61 in a formation region of a microlens ML on the first low refractive index film 26m; a step S4 of heat treating the resist pattern 61 to deform the heat resist pattern 61 into a convex shape including a slope on an outer circumference side; and a step S5 of etching the high refractive index film 25m and the first low refractive index film 26m through the deformed resist pattern 61 so as to transfer the convex shape of the resist pattern 61.SELECTED DRAWING: Figure 2