MACH-ZEHNDER MODULATOR AND METHOD FOR FABRICATING MACH-ZEHNDER MODULATOR

摘要

To provide a Mach-Zehnder modulator having such a structure that an embedding resin body for embedding a waveguide mesa can be spaced apart from an electrode.SOLUTION: The Mach-Zehnder modulator includes: a semiconductor arm waveguide structure having a side face and an upper face; an embedding resin body embedding the semiconductor arm waveguide structure; an inorganic insulator region having an opening that reaches the upper face of the semiconductor arm waveguide structure and covering the side face of the semiconductor arm waveguide structure and the embedding resin body; and an electrode in contact with the upper face of the semiconductor arm waveguide structure via the opening of the inorganic insulator region.SELECTED DRAWING: Figure 6