DIFFRACTION OPTICAL ELEMENT, MULTIFACETED BODY, INSPECTION METHOD OF MULTIFACETED BODY, LIGHT IRRADIATION DEVICE, ADJUSTMENT METHOD OF LIGHT IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a diffraction optical element, a multifaceted body, an inspection method of multifaceted body, a light irradiation device and an adjustment method of light irradiation device capable of easily confirming that light from a light source hits a position deviated from a diffraction grating, and to provide the diffraction optical element, the multifaceted body, the inspection method of multifaceted body, the light irradiation device and the adjustment method of light irradiation device capable of grasping the position and the deviation amount in the case where the light from the light source hits the position deviated from the diffraction grating.;SOLUTION: A diffraction optical element 10 includes: a first diffraction grating region 10b in which a diffraction grating for projecting a first projection pattern 23 is constituted; and a second diffraction grating region 10c provided at least at part of an outer peripheral region of the first diffraction grating region 10b, and projecting a second projection pattern in which at least part is different from the first projection pattern 23. The second projection pattern includes a position deviation detection projection pattern 24 capable of determining the fact that the light which is to be radiated to the first diffraction grating region 10b is radiated to the second diffraction grating region 10c due to the position deviation.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2020,JPO&INPIT