Method of laser processing a laminated work stack for forming a contour line of a first transparent workpiece and separating a resin layer from the first transparent workpiece

摘要

A method of laser processing a laminated work stack includes forming an outline in a first transparent work of a laminated work stack having a resin layer disposed between a first transparent work and a second transparent work. Including. Forming the contour line includes focusing the pulsed laser beam on the pulsed laser beam focus line directed to the first transparent work, causing induced absorption in the first transparent work, and focusing the pulsed laser beam. Translating the line along a first workpiece separation line, whereby the laser forms a contour having a plurality of defects. The method also includes focusing the pulsed laser beam on the pulsed laser beam focal line directed at the resin layer and translating the pulsed laser beam focal line along the resin separation line, whereby the laser ablates the resin layer. And separating the resin layer along the resin separation line.