COATING, DEVELOPMENT APPARATUS AND COATING, AND DEVELOPMENT METHOD

摘要

To perform a high uniformity process between a plurality of substrates.SOLUTION: An apparatus is structured by constructing: a processing block having a plurality of substrate conveyance regions which is separated each other when they are vertically laminated; a processing module provided in the plurality of substrate conveyance regions; a conveyance mechanism that is provided to each of the plurality of substrate conveyance regions, and conveys a substrate between a conveyance block and a processing module; a temperature adjustment module that adjusts a temperature of the substrate before the conveyance to the processing module for adjusting the temperature of the substrate in at least one processing module from the plurality of processing modules, and performs the conveyance of the substrate of which the temperature is adjusted by the conveyance mechanism; a temperature sensor that detects an atmospheric temperature of at least one substrate conveyance region of the plurality of substrate conveyance regions; and a temperature changing mechanism that changes the temperature of the substrate in the temperature adjustment module on the basis of the atmospheric temperature detected by the temperature sensor.SELECTED DRAWING: Figure 12