EVALUATION METHOD OF INNER PERIPHERAL SURFACE OF QUARTZ CRUCIBLE, AND EVALUATION DEVICE OF INNER PERIPHERAL SURFACE OF QUARTZ CRUCIBLE

摘要

To provide an evaluation method of an inner peripheral surface of a quartz crucible capable of evaluating an inner peripheral surface of a quartz crucible simply and in a short time.SOLUTION: An evaluation method of an inner peripheral surface of a quartz crucible of the invention comprises a first step for photographing an inner peripheral surface of a quartz crucible used for drawing a silicon single crystal ingot to obtain an image of the inner peripheral surface, a second step for image processing the obtained image to obtain an edge image defining a boundary between cristobalite and glass, a third step for extracting a closed region enclosed by the boundary in the edge image, a fourth step for calculating on coordinate information of the boundary in the extracted closed region based on an annulus shape of the cristobalite to obtain a calculated value, a fifth step for determining whether the closed region enclosed by the boundary is the cristobalite or the glass based on the calculated value, and a sixth step for forming whole image by accumulating the closed region determined to be the cristobalite.SELECTED DRAWING: Figure 2