Method and device for measuring out-of-plane displacement distribution and three-dimensional shape of measurement object

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a distribution of displacement of an object to be measured located relatively far away in an out-of-plane direction in a state where a light projecting side and a light receiving side are arranged substantially coaxially, and an apparatus using the method. In a measurement method of projecting interference fringes on the surface of an object and imaging reflected light of the projected interference fringes by an imaging means, the interference fringes are interference of coherent light waves emitted from three directions. On the basis of the principle, a three-beam interference fringe is formed which includes an area where interference fringes appear and an area where interference fringes do not appear in the irradiation direction of light emitted from three directions. Measure the shape. [Selection diagram] Figure 1