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Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry

机译:用相位测量偏转法测量镜面物体的三维形状

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摘要

The fast development in the fields of integrated circuits, photovoltaics, the automobile industry, advanced manufacturing, and astronomy have led to the importance and necessity of quickly and accurately obtaining three-dimensional (3D) shape data of specular surfaces for quality control and function evaluation. Owing to the advantages of a large dynamic range, non-contact operation, full-field and fast acquisition, high accuracy, and automatic data processing, phase-measuring deflectometry (PMD, also called fringe reflection profilometry) has been widely studied and applied in many fields. Phase information coded in the reflected fringe patterns relates to the local slope and height of the measured specular objects. The 3D shape is obtained by integrating the local gradient data or directly calculating the depth data from the phase information. We present a review of the relevant techniques regarding classical PMD. The improved PMD technique is then used to measure specular objects having discontinuous and/or isolated surfaces. Some influential factors on the measured results are presented. The challenges and future research directions are discussed to further advance PMD techniques. Finally, the application fields of PMD are briefly introduced
机译:集成电路,光伏,汽车工业,先进制造和天文学领域的快速发展导致快速,准确地获取镜面表面的三维(3D)形状数据以进行质量控制和功能评估的重要性和必要性。由于动态范围大,非接触式操作,全场和快速采集,高精度和自动数据处理的优点,相位测量偏转法(PMD,也称为条纹反射轮廓测定法)已被广泛研究和应用。许多领域。反射条纹图案中编码的相位信息与所测镜面对象的局部斜率和高度有关。通过积分局部梯度数据或直接根据相位信息计算深度数据来获得3D形状。我们介绍了有关经典PMD的相关技术。然后,将改进的PMD技术用于测量具有不连续和/或隔离表面的镜面对象。介绍了影响测量结果的一些因素。讨论了挑战和未来的研究方向,以进一步推进PMD技术。最后,简要介绍了PMD的应用领域。

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