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CHIP INCLUDING MULTIPLE LIFT-OUT NEEDLES, MICROMANIPULATOR, AND SYSTEM FOR PREPARING MICROMANIPULATOR
CHIP INCLUDING MULTIPLE LIFT-OUT NEEDLES, MICROMANIPULATOR, AND SYSTEM FOR PREPARING MICROMANIPULATOR
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机译:包括多个提升针的芯片,微操纵器以及用于准备微操纵器的系统
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摘要
To provide a micromanipulator and a system that prepares a micromanipulator which facilitate exchange of a tip probe of a vacuum-compatible micromanipulator performing liftout and increase a system uptime.SOLUTION: In a chip having a plurality of rods that are formed apart from a base material 104 and are connected to each other at their respective longitudinal end portions, and includes a connector for holding the rods on the base material 104, each of the rods is individually lifted off the tip for use by a micromanipulator by cutting the rod from the connector at both first and second end portions.SELECTED DRAWING: Figure 2
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