Modeling for integrated micromanipulator

摘要

According to the principle of a piezoelectric scanner, a three degree-of-freedom (D. O. F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator.Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been establish for the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.