Systems and methods to increase the efficiency of power supply for megahertz radio frequency generators in the presence of kilohertz radio frequency generators

摘要

A system and a method for adjusting a radio frequency (RF) generator are described. One of the methods involves supplying a high frequency RF signal to the IMN by a high frequency RF generator. This method involves accessing multiple measurements of variables measured at the output of a high frequency RF generator to generate parameters. The variables are measured during multiple operating cycles of the low frequency RF generator. The measurements are associated with multiple values of power supplied by the high frequency RF generator. The method involves determining for one cycle the frequency value of the high frequency RF generator and the factor associated with the IMN shunt circuit, which is more efficient at the power supplied by the high frequency RF generator. .. [Selection diagram] Fig. 1