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Systems and Methods for Increasing Efficiency of Delivered Power of a Megahertz Radio Frequency Generator in the Presence of a Kilohertz Radio Frequency Generator
Systems and Methods for Increasing Efficiency of Delivered Power of a Megahertz Radio Frequency Generator in the Presence of a Kilohertz Radio Frequency Generator
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机译:在千赫兹射频发生器存在的情况下提高兆赫兹射频发生器的输出功率效率的系统和方法
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摘要
Systems and methods for tuning a radio frequency (RF) generator are described. One of the methods includes supplying, by a high frequency RF generator, a high frequency RF signal to the IMN. The method includes accessing a plurality of measurement values of a variable measured at an output of the high frequency RF generator to generate a parameter. The variable is measured during a plurality of cycles of operation of a low frequency RF generator. The measurement values are associated with a plurality of values of power supplied by the high frequency RF generator. The method includes determining, for one of the cycles, a value of a frequency of the high frequency RF generator and a value of a factor associated with a shunt circuit of the IMN for which there is an increase in efficiency in power delivered by the high frequency RF generator.
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