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Ferroelectric thin film multilayer substrate, ferroelectric thin film element, and method for manufacturing ferroelectric thin film multilayer substrate
Ferroelectric thin film multilayer substrate, ferroelectric thin film element, and method for manufacturing ferroelectric thin film multilayer substrate
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机译:铁电薄膜多层基板,铁电薄膜元件以及铁电薄膜多层基板的制造方法
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摘要
There is provided a ferroelectric thin-film laminated substrate, including a substrate, and further including a lower electrode layer, a ferroelectric thin-film layer, an upper electrode adhesive layer, and an upper electrode layer being sequentially stacked on the substrate, in which: the lower electrode layer is made of platinum or a platinum alloy; the ferroelectric thin-film layer is made of a sodium potassium niobate (typical chemical formula of (K 1-x Na x )NbO 3 , 0.4 ‰¤ x ‰¤ 0.7); the upper electrode layer is made of gold; the upper electrode adhesive layer is made of a metal that has less oxidizability than titanium and can make a solid solution alloy without generating an intermetallic compound with gold; and a part of the upper electrode adhesive layer and a part of the upper electrode layer are alloyed.
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机译:提供一种铁电薄膜层叠基板,其包括基板,并且还包括依次堆叠在基板上的下电极层,铁电薄膜层,上电极粘合剂层和上电极层,其中:下电极层由铂或铂合金制成;铁电薄膜层由铌酸钠钾((K 1-x Na x)NbO 3的典型化学式,0.4‰x‰0.7)制成;上电极层由金制成。上电极粘合剂层由氧化性比钛低的金属制成,并且可以在不与金产生金属间化合物的情况下制成固溶体合金。上部电极粘接剂层的一部分和上部电极层的一部分被合金化。
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