Ferroelectric and dielectric properties of (Bi,La){sub}4Ti{sub}3O{sub}12/Pb(Zr,Ti)O{sub}3 multilayer thin films on LaNiO{sub}3-coated Pt/Ti/SiO{sub}2/Si substrates

摘要

We proposed and fabricated a multilayer structure with the configuration of capacitor Pt/(Bi{sub}3.25La{sub}0.75)Ti{sub}3O{sub}12/Pb(Zr,Ti)O{sub}3/LaNiO{sub}3/Pt/Ti/SiO{sub}2/Si based on the consideration that both Pb(Zr,Ti)O{sub}3 films on LaNiO{sub}3 oxide electrodes and (Bi{sub}3.25La{sub}0.75)Ti{sub}3O{sub}12 films on Pt electrodes exhibit good fatigue properties. The multilayer structure thin films were prepared by a chemical solution deposition method. The electrical measurements confirmed that the multilayer films exhibit a high fatigue resistance against polarization switching up to 3×10{sup}10 cycles.