首页> 外国专利> EMBEDDED TYPE PASSIVE ELEMENT STRUCTURE

EMBEDDED TYPE PASSIVE ELEMENT STRUCTURE

机译:嵌入式被动元件结构

摘要

To provide an embedded type passive element structure.SOLUTION: An embedded type passive element structure includes: a first conductive metal layer; an electric resistance layer; a dielectric layer; a support layer; a bonding layer; and a second conductive metal layer. Specifically, a development and etching process is implemented to the embedded type passive element structure of the present invention at two times, and thereafter, an electronic circuit containing at least one thin film electric resistance element, at least one thin film inductance element, and at least one thin film capacitor element onto the embedded type passive element structure simultaneously. According to a layout of the present invention, the electric resistance layer is an electric resistance film made of an alloy, a metal, or a metal compound produced by a spattering technique. The electric resistance layer formed by the spattering has denseness and continuity higher coated film, and therefore, the minimum value of the surface resistance is lower than 5 ohmic/sq., or equals to them. Simultaneously therewith, the electric resistance film made of an alloy, a metal, or a metal compound produced by using the spattering technique can reduce effectively the generation of industrial waste water.SELECTED DRAWING: Figure 3
机译:提供一种嵌入式的无源元件结构。解决方案:嵌入式的无源元件结构包括:第一导电金属层;以及第二导电层。电阻层;介电层;支撑层;粘结层;第二导电金属层。具体地,对本发明的嵌入式无源元件结构进行两次显影和蚀刻工艺,其后,电子电路包含至少一个薄膜电阻元件,至少一个薄膜电感元件以及至少一个。至少一个薄膜电容器元件同时嵌入到嵌入式无源元件结构上。根据本发明的布局,电阻层是由通过溅射技术生产的合金,金属或金属化合物制成的电阻膜。通过溅射形成的电阻层具有致密性和连续性较高的涂膜,因此,表面电阻的最小值小于5欧姆/平方,或者等于或小于5欧姆/平方。同时,用溅射技术生产的合金,金属或金属化合物制成的电阻膜可有效减少工业废水的产生。选图:图3

著录项

  • 公开/公告号JP2020068368A

    专利类型

  • 公开/公告日2020-04-30

    原文格式PDF

  • 申请/专利权人 INTECH ELECTRONICS CO LTD;

    申请/专利号JP20190048435

  • 发明设计人 XIE ZONG HE;

    申请日2019-03-15

  • 分类号H01G4/40;C23C14/14;C23C14/06;C23C14/08;H01G4/30;H01G4/33;H01C13;H01C7;H01F17;

  • 国家 JP

  • 入库时间 2022-08-21 11:35:28

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号