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Board cassette

机译:板卡匣

摘要

PROBLEM TO BE SOLVED: To provide a substrate cassette capable of stacking curved substrates so as to be parallel to each other as much as possible and storing them. SOLUTION: A substrate cassette (10) accommodating many substrates (32) laminated to each other, such as a wafer, has a first side surface (14) and a second side surface parallel to the first side surface (14). It has a housing including (16) and. At least an elongated first support (20) is provided for the substrate in the housing between the side surfaces (14, 16). The support (20) is separated from the first side surface (14) at least in part. The first aspect (14) is closest to at least one first support (20). [Selection diagram] Fig. 2
机译:解决的问题:提供一种能够堆叠弯曲的基板以使其尽可能彼此平行并存储它们的基板盒。解决方案:容纳许多彼此层压的基板(32)(例如晶片)的基板盒(10)具有第一侧面(14)和与第一侧面(14)平行的第二侧面。它的外壳包括(16)和。在壳体中在侧面(14、16)之间为基板提供至少一个细长的第一支撑件(20)。支撑件(20)至少部分地与第一侧面(14)分离。第一方面(14)最接近至少一个第一支撑件(20)。 [选择图]图2

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