ORGANIC-INORGANIC HYBRID FILM, SURFACE STRESS SENSOR, AND METHOD FOR PRODUCING ORGANIC-INORGANIC HYBRID FILM

摘要

PROBLEM TO BE SOLVED: To provide a film that can be used as a sensitive film of a surface stress (MSS) sensor, has excellent productivity and reproducibility, and does not deteriorate in its shape even when exposed to steam of high-concentration volatile organic compounds (VOCs), and has excellent structural stability.;SOLUTION: An organic-inorganic hybrid film has an SiO_3/2 skeleton modified with an organic functional group containing at least one selected from the group consisting of a carbon atom, a nitrogen atom, an oxygen atom, a sulfur atom, a halogen atom, a boron atom, and a phosphorus atom, the organic-inorganic hybrid film having a shape like a coffee ring.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2020,JPO&INPIT