Flexible equipment front-end module interface, environmentally controlled equipment front-end module, and assembly method

摘要

A device front end module interface for a device front end module including environmental control is provided. The instrument front end module interface includes a first mounting member configured to couple to the load lock assembly. A flexible seal connected to the first mounting member is provided. The flexible seal provides a seal between the instrument front end module and the load lock assembly, and also eliminates axial and other misalignments between the load lock assembly and the instrument front end module during assembly. Correspond. In another aspect, an instrument front end module including an instrument front end module interface and a method of assembling a load lock assembly to an instrument front end module using the instrument front end module interface are provided. [Selection] Figure 1D