HIGH-PURITY RAW MATERIAL GAS SUPPLY METHOD, AND HIGH-PURITY RAW MATERIAL GAS SUPPLY FACILITY

摘要

To provide a high-purity raw material gas supply method which is capable of reducing a failure in a raw material gas supply facility and supplies a stable high-quality and/or high-purity boron-based high-purity raw material gas.SOLUTION: Processing of supply of an inert gas to a main pipe (supply pipe) La (step S1) and exhaustion and vacuuming (step S2) is repeated until a concentration of moisture and boric acid in the main pipe La becomes equal to or lower than a specific value (step S3). Processing of supply of an inert gas to a boron-based gas container 2 (step S4) and exhaustion and vacuuming (step S5) is repeated until a concentration of moisture and boric acid in the boron-based gas container 2 becomes equal to or lower than a specific value (step S6). Processing of supply of a high-purity raw material gas to the boron-based gas container 2 (step S7) and exhaustion and vacuuming (step S8) is repeated until a concentration of moisture and boric acid in the boron-based gas container 2 becomes equal to or lower than a specific value (step S9).SELECTED DRAWING: Figure 1