POSITION MEASUREMENT METHOD, DISTANCE CALCULATION METHOD, STRUCTURE MANUFACTURING METHOD, DISTANCE CALCULATION DEVICE, AND COMPUTER PROGRAM

摘要

To make it possible to measure a position of a boundary surface of a layer of a multilayer structure by increasing a detection signal of electromagnetic wave reflected on a position corresponding to the boundary surface even when the detection signal of the electromagnetic wave reflected on the boundary surface is small.SOLUTION: In a position measurement method of measuring a position of a boundary surface of a layer of a multilayer structure by emitting electromagnetic wave to the multilayer structure, the position of the boundary surface is measured by arranging a reflector on the boundary surface for reflecting the electromagnetic wave, emitting the electromagnetic wave to the multilayer structure, and detecting the electromagnetic wave reflected by the reflector.SELECTED DRAWING: Figure 2