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Ultrasonic transducer, ultrasonic probe, ultrasonic device, method of manufacturing ultrasonic transducer, and vibration device
Ultrasonic transducer, ultrasonic probe, ultrasonic device, method of manufacturing ultrasonic transducer, and vibration device
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机译:超声波换能器,超声波探头,超声波装置,超声波换能器的制造方法以及振动装置
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摘要
An ultrasonic sensor includes: a substrate in which an opening is formed; a vibration film that is provided on the substrate so as to close the opening; a plurality of vibration elements that are disposed at positions where the vibration film and the opening overlap each other in a plan view along a thickness direction of the vibration film; a sealing plate that is disposed so as to face the vibration film, supports the vibration film, and has a surface facing the vibration film as a flat surface; and a suppressing portion that is provided between the adjacent vibration elements in the plan view, is bonded to both the vibration film and the sealing plate, and is formed of a resin material for suppressing transmission of vibration of the vibration film.
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