Anode electrode shield used in reverse magnetron cold cathode ionization gauge

摘要

A cold cathode ionization gauge capable of maintaining a free electron plasma density versus pressure is provided. A cold cathode ionization gauge includes an extended anode and a cathode surrounding the anode along its length. The cathode forms a discharge space around the anode that enables the generation of plasma between the anode and the cathode and the generation of ionic current to the cathode. In addition, this vacuum gauge is attached to the cathode, which is attached to the cathode, and is separated from the anode by applying a magnetic field passing through the discharge space to maintain the plasma by lengthening the path of free electrons and maintaining the plasma. And an electric controller. The shield is electrically insulated from the insulator and shields the insulator from plasma electrons. The electrical controller applies a voltage between the anode and the cathode to cause ionization by plasma discharge and determines the pressure based on the measured ionic current to the cathode. [Selection diagram] FIG. 5A