Microscopic analysis method of fine particles and analyzer used for microscopic analysis method of fine particles

摘要

PROBLEM TO BE SOLVED: To provide a fine particle microscopy analysis method and analysis device for use in the fine particle microscopic analysis method that predict and analyze a shape of a nanoparticle having finite periodicity with resolving power of an atomic level in all of x, y and z directions, and allow the shape analysis of the nanoparticle to reveal a material characteristic (physical property).SOLUTION: A fine particle microscopy analysis method includes: a beam irradiation step of irradiating fine particles with a parallel beam; a detection step of photographing an electron diffraction figure; an alignment check step of analyzing a diffraction spot of the electron diffraction figure to determine a shape of the fine particle. The alignment check step is configured to conduct a Laue sub-spot analysis between main spots to determine the shape of the fine particle.SELECTED DRAWING: Figure 6