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Quality inspection method for chemicals

机译:化学品质量检验方法

摘要

The quality inspection method according to an embodiment of the present invention is a quality inspection method for a chemical liquid used for manufacturing a semiconductor substrate, including a step W of preparing a first container and washing at least a portion of a liquid contact portion by using a portion of the chemical liquid, a step A of performing concentration of a portion of the chemical liquid by using the washed first container so as to obtain c liquid, a step B of performing measurement of a content of a specific component in c liquid, and a step C of comparing the content of the specific component with a preset standard value. The step W, the step A, the step B, and the step C are performed in this order, at least the step W and the step A are performed in a clean room having cleanliness equal to or higher than class 4 specified in ISO14644-1:2015, the concentration is performed in at least one kind of inert gas selected from the group consisting of an Ar gas, a He gas, and a N2 gas or under reduced pressure, and the measurement is performed by a predetermined measurement method.
机译:根据本发明实施例的质量检查方法是用于制造半导体衬底的化学液体的质量检查方法,包括以下步骤W:准备第一容器,并通过使用清洗至少一部分液体接触部分。一部分药液,通过使用清洗后的第一容器对一部分药液进行浓缩以获得c液的步骤A,对c液中特定成分的含量进行测量的步骤B,步骤C,将特定成分的含量与预设标准值进行比较。步骤W,步骤A,步骤B和步骤C以此顺序执行,至少步骤W和步骤A在洁净度等于或高于ISO14644-4规定的洁净室中执行在1:2015中,在选自Ar气,He气和N2气的至少一种惰性气体中或在减压下进行浓缩,并且通过预定的测量方法进行测量。

著录项

  • 公开/公告号JP6751446B2

    专利类型

  • 公开/公告日2020-09-02

    原文格式PDF

  • 申请/专利权人 富士フイルム株式会社;

    申请/专利号JP20180560393

  • 发明设计人 上村 哲也;

    申请日2017-12-28

  • 分类号G01N33;G01N30/88;G01N30/72;G01N27/62;

  • 国家 JP

  • 入库时间 2022-08-21 11:33:21

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